Enviromentally aware IC chip manufacturing

Imec’s approach to embedding sustainability into semiconductor R&D is shared. imec has developed the imec.netzero platform to quantify environmental impacts at fab, technology and process levels, enabling data-driven decisions throughout the IC manufacturing value chain. More recently, imec introduced the e-score metric to enable simple communication of environmental impact without demanding a background in LCA (Life Cycle Analysis) or the ESG (Environmental, Social, and Governance) framework for evaluating a company's performance beyond traditional financial metrics. The e-score methodology will be used to illustrate how imec’s SSTS program prioritizes development activities in the fab. Starting with the identification of technology hotspots, examples of work on high impact processes, and the quantification of potential impact reduction will be described. Finally, the benefits of sustainable development beyond the environment will be described.