Zsolt Tökei

Zsolt Tőkei is fellow, and program director of 3D System Integration at imec. He joined the organization in 1999 and, since then, has held various technical positions. First, as a process engineer and researcher in the field of copper low-k interconnects, then headed the metal section. Later he became principal scientist, and program director of nano-interconnects and more recently transitioned to 3D System Integration. He earned a M.S. (1994) in physics from the University Kossuth in Debrecen, Hungary. In the framework of a co-directed thesis between the Hungarian University Kossuth and the French University Aix Marseille-III, he obtained his Ph.D. (1997) in physics and materials science. In 1998, was with Max-Planck Institute of Düsseldorf, Germany, as a post-doctorate researcher. Joining imec, he continued working on a range of interconnect issues, including scaling, metallization, electrical characterization, module integration, reliability, and system aspects. He authored or co-authored more than 500 scientific papers and conference publications, holds over 30 patents, served as committee member of IRPS, IEDM, IITC.